Dow Corning Electronics says it has introduced a range of silicon-based resins for bi-layer 193-nanometer (nm) photoresists and antireflective coatings used to produce semiconductors. The resins are being tested at a number of photoresist producers, the company says.
Dow Corning is an established supplier of gels, encapsulants, spin-on materials and dielectric layer precursors to semiconductor makers, but the silicon resins are the company's first products to supply the photolithographic market. The semiconductor industry is currently starting production of devices with line-width geometries of 90 nm that require use of 193-nm …
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